
4 Test Head Filling and DUT Board Considerations Wafer Prober DUT Board and Probe Card
108 System Reference, January 2001
DPS pogo pads The units next to the center of the probe card with the
grey numbers are for the DPS pogo pads: Those four units
next to the utility lines contain the ground and the power
lines of the four DPS channels 1-4, while the four units
next to the center of the probe card contain the gard lines,
power and ground sense lines and the ground lines of
channels 1-4.
For a detailed description of a probe card segment see
“General Structure of a Probe Card Segment” on
page 108.
General Structure of a Probe Card Segment
See also the drawing
D-E7018-96502-1S11B
In Figure 48 on page 108, the general structure of all
probe card segments is illustrated.
Figure 48 General Structure of a Probe Card Segment
GSX3
13 09 05 01
14 10 06 02
15 11 07 03
16 12 08 04
13 09 05 01
14 10 06 02
15 11 07 03
16 12 08 04
13 09 05 01
14 10 06 02
15 11 07 03
16 12 08 04
13 09 05 01
14 10 06 02
15 11 07 03
16 12 08 04
13 09 05 01
14 10 06 02
15 11 07 03
16 12 08 04
13 09 05 01
14 10 06 02
15 11 07 03
16 12 08 04
13 09 05 01
14 10 06 02
15 11 07 03
16 12 08 04
13 09 05 01
14 10 06 02
15 11 07 03
16 12 08 04
P17/3 P17/1
P17/4 P17/2
U19
U17
U20
U18
U15
U16
U13
U14
U11
U12
U09
U10
U07
U08
U05
U06
U03
U04
U01
U02
GX2
PX2
GX2GX3
PX3
GX3
PX3
GX3
GX4
PX4
GX4 GX4
PX4
PX3
GX2
PX2
PX2
GX1
PX1
GX1
PX1
GX1
PX1
PX4
PSX3
PSX4
GrdX4
GrdX1
GrdX2
GrdX3
GSX4
GSX1
GSX2
PSX1
PSX2
GSX3
Group X
Grd
GS
F
S
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