
4 Test Head Filling and DUT Board Considerations Wafer Prober DUT Board and Probe Card
114 System Reference, January 2001
Table 25 assigns the number of the HPMU the four lines of
a segment are connected to.
Table 25 Assignment of Sense, Ground Sense, Force and Gard Line of
which Segment connect to which HPMU
m
The heavily shaded grey area in Figure 48 on page 108 is
the pogo pad area of the DPS channels.
DPS pogo pads on the probe
card
The DPS pogo pad area of each segment supports four
channels. Each channel consists of three Power lines (P)
which are ganged. Additionally, per channel, there are
three Ground lines (G).
In the lowest part of the segment,
•a Power Sense line (PS),
•a Ground Sense line (GS) and
•a GaRD line (GRD)
for all four DPS channels is placed.
For details on the DPS refer to Chapter 6 “Device Power-
Supply” on page 135.
Segment (Group) No.
containing the PogPads
of Sense, Ground Sense,
Force and Gard Line
12345678
No. of HPMU 12 21 22 11 42 31 32 41
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